Deposition facility
CESAR (Advanced Energy) RF power generator and ArF excimer laser source, model COMPexPro Lambda Physics (Coherent Inc.)
KEITHLEY 4200-SCS
Multi-sample electrical measurement system.
Four-point electrical measurement system
Model KEITHLEY 6220/2182A.
X-ray diffractometer
Model EMPYREAN (PANalytical).
Oven
Model CARBOLITE 3216.
IR lamp heating system
Model MILA-5000 (ULVAC Technologies Inc.).
Digital megohmeter
Measurement of high electrical resistance.
RF magnetron sputtering deposition facility
Model VARIAN ER 3119 EletroRava.
Vacuum thermal evaporation deposition facility
Model Balzers.
Quantum efficiency measurement equipment
Model Protoflex QE 1400.